Passive and Active Probe Arrays for Dip-Pen Nanolithography
نویسندگان
چکیده
The development of passive and active atomic force microscope (AFM) probe arrays is reported in this paper. The devices are specifically designed to work with Dip-Pen Nanolithography and are fabricated using MEMS micromachining techniques. These devices can generate sub-100nm patterns in a high speed, parallel, and controllable fashion.
منابع مشابه
Micromachined Arrayed Dip Pen Nanolithography Probes
We report the development of micromachined passive and active probe arrays for parallel dip pen nanolithography (DPN). DPN is a soft lithography method that allows direct, mask-less deposition of chemicals onto substrates with sub 100-nm resolution. An active DPN probe with thermal bimetallic actuation has been developed and tested. Lithographic results and an analytical tool for optimizing act...
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